Metal halide perovskites draw increasing attention as photodetector materials due to their strong visible light absorption and resulting photocurrent. The development of efficient fabrication routes to realize high-resolution perovskite pixel arrays is critical to enable practical devices.
In this work, we report a dry lift-off process to fabricate methylammonium lead iodide (MAPbI3) pixels on different substrates, with a resolution down to 5 µm. Accordingly, 8 × 10 photodetector arrays were fabricated on both glass and flexible polyethylene terephthalate (PET). These arrays show a sensitive photoresponse over a broad wavelength range from 320 to 760 nm. Moreover, when encapsulated by a Parylene-C overlayer, the photodetector arrays on glass substrate show remarkable air stability, without noticeable performance loss after 10 days in ambient air, and the flexible photodetector arrays on PET substrate show excellent bending tolerance, retaining nearly 95% of the response after 170 bending cycles.
The paper can be accessed here or on the Publications page of our website.
Chemical vapor deposition of metal-organic frameworks (MOF-CVD) will facilitate the integration of porous and crystalline coatings in electronic devices. In the two-step MOF-CVD process, a precursor layer is first deposited and subsequently converted to MOF through exposure to linker vapor.
This work discusses the impact of different metal oxide and metalcone layers as precursors for the MOF-CVD of zeolitic imidazolate framework ZIF-8 films. These precursor layers were prepared by atomic and molecular layer deposition, physical vapor deposition; the effect of treatments such as humidification and annealing of the precursors were also tested.