Oriented and Area-Selective Growth of Zeolitic Imidazolate Framework-8 Films by Molecular Layer Deposition @Chemistry of Materials

Integrating metal–organic frameworks (MOFs) into microfabrication processes will benefit from controlled vapor-phase deposition techniques. This study presents a molecular layer deposition method that enables area-selective and oriented growth of zeolitic imidazolate framework-8 (ZIF-8) films. Substrates functionalized with self-assembled monolayers (SAMs) with different end groups (alkyl, phenyl, hydroxyl, carboxyl, amine, and imidazole) allow tuning the degree of crystallographic orientation in the resulting MOF layers. Spatial control over SAM formation determined the surface mobility of the ZIF-8 building blocks, which enabled area-selective deposition.

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