The Solution

Metal-Organic Frameworks (or MOFs) are a class of materials with a very porous crystal structure and insulating (low-k) properties. They consist of Zn atoms on the nodes of the crystal framework connect by imidazolate ligands. The Ameloot research group has managed to control the growth of this material down to the nanoscale by a vapor deposition method.  In the first step, a zinc oxide layer is deposited by atomic layer deposition. Second, the oxygen is replaced relatively large imidazolate molecules thus creating a very open structure.

 

 

This approach of creating insulation at the nanoscale has several advantages:

 

• bottom-up growth is key to homogeneous filling

• solvent-free growth by self-assembly and therefore no mechanical stress

• low-k values

• low-temperature processing (<150°C)

 

Technology Offer

Patent family: EP3137647

We are looking for a partner(s) with expertise in the development, production of integrated circuits and a strategic interest to develop front end IC technology either by collaboration or by patent/technology transfer.    

 

Selected References

Krishtab, M., Stassen, I., Stassin, T., Cruz, A. J., Okudur, O. O., Armini, S., Wilson, C., De Gendt, S., and Ameloot, R., Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics. Nature Communications 10, 3729 (2019). Link to Publisher PDF

Stassen, I., Styles, M., Grenci, G., Gorp, H. V., Vanderlinden, W., Feyter, S. D., Falcaro, P., DeVos, D. E., Vereecken, P., and Ameloot, R., Chemical vapour deposition of zeolitic imidazolate framework thin films. Nature Materials 15, 304–310 (2016). Link to Publisher PDF

Cruz, A. J., Stassen, I. Krishtab, M., Marcoen, K., Stassin, T., Rodríguez-Hermida, S., Teyssandier, J., Pletincx, S., Verbeke, R., Rubio-Giménez, V., Tatay, S., Martí-Gastaldo, C., Meersschaut, J., Vereecken, P. M., De Feyter, S., Hauffman, T., and Ameloot, R., Integrated cleanroom process for the vapor-phase deposition of large-area zeolitic imidazolate framework thin films. Chemistry of Materials 31 (22), 9462−9471 (2019). Link to Publisher PDF

 

Contact

The Ameloot Group

​KU Leuven
Centre for Membrane Separations, Adsorption, Catalysis, and Spectroscopy for Sustainable Solutions ​(cMACS)
Leuven Chem&Tech
Celestijnenlaan 200F – box 2454
3001 Leuven, Belgium
Contact: Dr. Bart van Duffel (Innovation Manager)
Email: [email protected]
Phone: +32 16 19 43 85

 

imec

Dr. ​Silvia Armini
Principal Member of the Technical Staff
Unit Process and Modules
Kapeldreef 75
3001 Leuven, Belgium
Contact: [email protected]
Phone: +32 16 28 86 17

 

This project has received funding from the European Research Council (ERC) under the European Union’s (EU) Horizon 2020 research and innovation program (grant agreements no. 716472, acronym: VAPORE)